Phys. Rev. A 58, 2881–2886 (1998)Low-energy electron scattering from BCl3Received 8 April 1998; published in the issue dated October 1998 Despite the importance of BCl3 in plasmas used for commercial etching processes, no calculations or measurements of elastic low-energy electron scattering from BCl3 have previously appeared in the literature. We therefore present calculations based on the complex Kohn method for elastic electron-BCl3 scattering at incident electron energies below 8 eV. We find a near-zero-energy virtual state and a sharp temporary negative-ion resonance at 0.25 eV, which likely contributes to the large electron attachment cross sections observed in swarm studies. © 1998 The American Physical Society URL:
http://link.aps.org/doi/10.1103/PhysRevA.58.2881
DOI:
10.1103/PhysRevA.58.2881
PACS:
34.80.Bm
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